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KMID : 0381920120420040212
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Korean Journal of Microscopy
2012 Volume.42 No. 4 p.212 ~ p.217
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Effects of Post Annealing on the Electrical Properties of ZnO Thin Films Transistors
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Moon Mi-Ran
An Chee-Hong
Na Sek-Won
Jeon Ha-Seok
Jung Dong-Eun
Kim Hyoung-Sub
Lee Hoo-Jeong
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Abstract
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This paper reports the effects of post-annealing of ZnO thin fi lms on their microstructure and the device performance of the transistors fabricated from the films. From X-ray diffraction and transmission electron microscopy characterization, we uncovered that the grain size increased with the annealing temperature escalating and that the film stress shifted from compressive to tensile due to the grain size increment. Electrical characterization revealed that the grain size increase damaged the device performance by drastically lifting the off-current level. By annealing the devices in an O2 ambient (instead of air), we were able to suppress the off-current while improving the electron mobility.
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KEYWORD
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ZnO, Thin-film transistor, Grain size, Electron mobility, Thin film stresses
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